Corrosion Reasons of Argon-Rich Tail Gas Recovery Pipeline for Single Crystal Silicon Pulling Furnace

The corrosion causes of argon-rich tail gas recovery pipeline from single crystal silicon pulling furnace were studied by means of equipment operation analysis and chemical composition analysis. The results showed that the cause of pipeline corrosion was that the lubricating oil of the vacuum pump decomposes at high temperature to produce a variety of corrosive substances such as hydrogen fluoride, hydrogen sulfide and hydrogen chloride. These corrosive substances were dissolved in condensed water and gradually accumulated with the extension of time, thus aggravating the corrosion of the pipeline. The pipeline corrosion problem was solved by adsorbent adsorption, deionized water absorption and optimization of pipeline material and wall thickness.