Ettect of Sputtering Parameters on Corrosion Resistance of (Zr,Ti)N Composite Film

(Zr,Ti)N composite film was prepared on Q235 steel by vacuum sputtering technology.Changing sputtering conditions such as temperature,flow ratio of N2 to Ar and matrix bias voltage,eight kinds of (Zr,Ti)N film samples were obtained.The difference of corrosion resistance of the samples was analyzed by polarization curves and Tafel linear extrapolation method after immersion in 3.5% NaCl solution for 30~60 min.The results indicated that the corrosion behavior of the film was influenced by sputtering conditions.The optimal process parameters were sputtering temperature 350 ℃,ratio of Ar to N2 60 /30(SCCM) and matrix bias voltage 120 V.